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(2003) Effects of the Physical Characteristics of Cerium Oxide on Plas…

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댓글 0건 조회 477회 작성일 22-03-03 13:00

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Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation

Sang-Kyun KIM, Ungyu PAIK, Seong-Geun OH, Yong-Kook PARK, Takeo KATOH and Jea-Gun PARK

(2003) Jpn. J. Appl. Phys., 42, 1227–1230

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Papers 목록
번호	제목	글쓴이	조회	날짜
열람중	(2003) Effects of the Physical Characteristics of Cerium Oxi…	NHML	478	03-03
176	(2003) Metal oxide in aqueous organic solution promoted chem…	NHML	580	03-03
175	(2003) Monodisperse Polymer/Metal Composite Particles by Ele…	NHML	559	03-03
174	(2003) Nano-structure biphasic polymer film on the hair surf…	NHML	549	03-03
173	(2003) Pore Structures and Acidities of Al-Pillared Montmori…	NHML	631	03-03
172	(2003) Preparation and antibacterial effects of Ag–SiO2 thin…	NHML	611	03-03
171	(2003) Preparation of hollow silica microspheres in W/O emul…	NHML	717	03-03
170	(2003) Stabilization of Water-Soluble Antioxidant in Water-i…	NHML	536	03-03
169	(2003) Synthesis of L-Ascorbic Acid Derivative Including 3-A…	NHML	625	03-03
168	(2004) 접촉각 측정을 통한 Alkanethiol로 표면 처리한 은 분말의 표면 특성 연구	NHML	640	03-03
167	(2004) Surface Properties of Amphoteric Copolymers: contact …	NHML	602	03-03
166	(2004) Preparation of silver dendritic nanoparticles using s…	NHML	580	03-03
165	(2004) Effect of Silver Nanoparticles on the Dynamic Crystal…	NHML	548	03-03
164	(2004) Fabrication of silver nanotubes using functionalized …	NHML	550	03-03
163	(2004) Microencapsulation of Cholesteryl Alkanoate by Polyme…	NHML	731	03-03
162	(2004) O/W/O Multiple Emulsions via One-Step Emulsification …	NHML	522	03-03
161	(2004) Poly(3,4-ethylenedioxythiophene) nanoparticles prepar…	NHML	587	03-03
160	(2004) Polymer/Ag composite microspheres produced by water-i…	NHML	491	03-03
159	(2004) Preparation and characterization of BaTiO3 particles …	NHML	611	03-03
158	(2004) Preparation of chromia nanoparticles by precipitation…	NHML	637	03-03
157	(2004) Preparation of silver nanorods through the control of…	NHML	619	03-03
156	(2004) The stabilization of L-ascorbic acid in aqueous solut…	NHML	586	03-03
155	(2005) 양성고분자의 환경응답특성	NHML	817	03-03
154	(2005) The Preparation of Fluorine-Containing Soil Release P…	NHML	621	03-03
153	(2005) 메조포러스 분자체에 담지된 Pt/Pd 촉매상에서 납사분해 잔사유의 방향족 화합물 수소화 특성	NHML	784	03-03
152	(2005) New approach for the control of size and surface char…	NHML	640	03-03
151	(2005) New Approach for Preparation of Silver–Polystyrene He…	NHML	671	03-03
150	(2005) Agglomeration behavior of chromia nanoparticles prepa…	NHML	558	03-03
149	(2005) Controlled release of retinol from silica particles p…	NHML	548	03-03
148	(2005) Effects of silver nanoparticles on the fluidity of bi…	NHML	554	03-03

Papers 목록

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글쓴이

조회

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열람중

(2003) Effects of the Physical Characteristics of Cerium Oxi…

NHML

478

03-03

176