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(2003) Effects of the Physical Characteristics of Cerium Oxide on Plas…

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댓글 0건 조회 455회 작성일 22-03-03 13:00

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Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation

Sang-Kyun KIM, Ungyu PAIK, Seong-Geun OH, Yong-Kook PARK, Takeo KATOH and Jea-Gun PARK

(2003) Jpn. J. Appl. Phys., 42, 1227–1230

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Papers 목록

번호

제목

글쓴이

조회

날짜

(2005) New approach for the control of size and surface char…

NHML

576

03-03

(2005) 메조포러스 분자체에 담지된 Pt/Pd 촉매상에서 납사분해 잔사유의 방향족 화합물 수소화 특성

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