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(2019) Degradation Test for an Anodic Aluminum Oxide Film in Plasma Et…

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Degradation Test for an Anodic Aluminum Oxide Film in Plasma Etching


Seung-Su Lee Min-Joong Kim Chin-Wook Chung Je-Boem Song Seong-Geun Oh Jin-Tae Kim Nak-Kwan Chung Ju-Young Yun  


 

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