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(2015) Effect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for …

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Effect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for Preventing Plasma Damage


 Song Je-Boem Kim Jin-Tae Oh Seong-Geun Shin Jae-Soo Chun Je-Ran Yun Ju-Young 

 
DOI:10.1166/sam.2015.2091 

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