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(2003) Effects of the Physical Characteristics of Cerium Oxide on Plas…

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Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation

Sang-Kyun KIM, Ungyu PAIK, Seong-Geun OH, Yong-Kook PARK, Takeo KATOH and Jea-Gun PARK

(2003) Jpn. J. Appl. Phys., 42, 1227–1230 

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