(2019) Contamination Particles and Plasma Etching Behavior of Atmosphe…

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작성자 NHML
댓글 0건 조회 856회 작성일 22-03-03 16:18

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Contamination Particles and Plasma Etching Behavior of Atmospheric Plasma Sprayed Y2O3 and YF3 Coatings under NF3 Plasma

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Coatings 9(2):102

DOI:10.3390/coatings9020102

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28	(2019) Contamination Particle Behavior of Aerosol Deposited …	NHML	893	03-03

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Contamination Particles and Plasma Etching Behavior of Atmospheric Plasma Sprayed Y2O3 and YF3 Coatings under NF3 Plasma

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