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(2019) Contamination Particle Behavior of Aerosol Deposited Y2O3 and Y…

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댓글 0건 조회 2,246회 작성일 22-03-03 16:23

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Contamination Particle Behavior of Aerosol Deposited Y2O3 and YF3 Coatings under NF3 Plasma


Je-Boem Song 
Eunmi Choi 
Seong-Geun Oh 
Jin-Tae Kim 
Ju-Young Yun



DOI:10.3390/coatings9050310 



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